Estimation of load matching conditions for the excimer gas discharge load

Author

Oleg, Kudryavtsev ; Serguei, Moisseev ; Mutsuo, Nakaoka ; Hideaki, Muraoka

Author_Institution

Power Electron. Lab., Yamaguchi Univ., Ube, Japan

Volume

1

fYear

2002

fDate

13-18 Oct. 2002

Firstpage

265

Abstract

Excimer gas discharge is recognized as an effective method of ultraviolet light generation, however low energy performances of power supply for such a load hinder its wider application in practice. In order to design more efficient power supply, in this research, frequency characteristics and power matching conditions of the excimer gas discharge load are evaluated. A new method for this evaluation is proposed and the results of its application are introduced in this paper, together with some consideration about power supply.

Keywords

discharges (electric); excimers; gas-discharge tubes; light sources; parameter estimation; power supplies to apparatus; excimer discharge tube; excimer gas discharge load; load matching conditions estimation; low energy performances; power matching conditions; power supply; ultraviolet light generation; Capacitance; Dielectrics; Discharges; Electron tubes; Frequency estimation; Inductors; Plasma temperature; Power supplies; RLC circuits; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Industry Applications Conference, 2002. 37th IAS Annual Meeting. Conference Record of the

Conference_Location

Pittsburgh, PA, USA

ISSN

0197-2618

Print_ISBN

0-7803-7420-7

Type

conf

DOI

10.1109/IAS.2002.1044098

Filename

1044098