A multi-axis force-moment micro sensor for application in fluid mechanics

This paper presents the development of a six-degree of freedom (6-DOF) force moment sensor utilizing the piezoresistive effects in silicon. The proposed sensor can independently detect six components of force and moment on a test particle in a turbulent flow. By combining p-type conventional and shear piezoresistors in Si[111], and arranging them suitably on the sensing area, the total number of piezoresistors used in this sensing chip is only eighteen, much fewer than that of the prior art piezoresistive 6-DOF force sensors. Calibration for six components of force versus output voltages was completed. The sensitivities are linear, close to the design values. Preliminary results of measurement of forces and moments acting on a test particle in turbulent flow will be presented.