DocumentCode
385231
Title
Modelling and design of MEMS for RF and millimeter wave applications
Author
Dubuc, D. ; Rabbia, L. ; Saadaoui, M. ; Flourens, E. ; Ducarouge, B. ; Aissi, M. ; Boughriha, F. ; Grenier, K. ; Pons, P. ; Graffeuil, J. ; Plana, R.
Author_Institution
Lab. d´´Autom. et d´´Anal. des Syst., CNRS, Toulouse, France
Volume
1
fYear
2002
fDate
2002
Firstpage
13
Abstract
This paper investigates the design methods which can be used to predict MEMS behavior with high accuracy. We presents EM methods, mechanical and thermal methods, and finally the electrothermal concept.
Keywords
electromagnetic field theory; micromechanical devices; microwave devices; millimetre wave devices; semiconductor device models; thermal analysis; EM methods; MEMS design; MEMS modelling; RF MEMS; electrothermal concept; mechanical methods; millimeter wave MEMS; thermal methods; Biomembranes; Electromagnetic modeling; Electrostatics; Finite difference methods; Micromechanical devices; Millimeter wave technology; Radio frequency; Radiofrequency microelectromechanical systems; Springs; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2002. CAS 2002 Proceedings. International
Print_ISBN
0-7803-7440-1
Type
conf
DOI
10.1109/SMICND.2002.1105791
Filename
1105791
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