NSPUDT resonator on langasite

Author

Fachberger, R. ; Riha, E. ; Born, E. ; Ruile, W. ; Wolff, U. ; Pongratz, P. ; Kronholz, S.

Author_Institution

Vienna Univ. of Technol., Austria

Volume

1

fYear

2002

fDate

8-11 Oct. 2002

Firstpage

501

Abstract

A SAW resonator design for NSPUDT substrates like Langasite with cut angles (0°,14°,22-24°) has been developed. It consists of a natural single phase unidirectional transducer (NSPUDT) combined with a bidirectional split finger transducer within reflection gratings. The resonance frequency of the two port resonators is around 400 MHz depending on the used crystal cut The measured frequency response shows excellent agreement with a P-matrix based simulation of the devices. The NSPUDT resonators processed on different Langasite (La₃Ga₅SiO₁₄) and Langatate (La₃Ta_0.5Ga_5.5O₁₄) wafers exhibit an insertion attenuation as low as 2.8 dB and loaded Q-values of up to 15000.

Keywords

gallium compounds; lanthanum compounds; surface acoustic wave resonators; La₃Ga₅SiO₁₄; La₃Ta_0.5Ga_5.5O₁₄; Langasite substrate; NSPUDT resonators; P-matrix based simulation; SAW resonator; bidirectional split finger transducer; frequency response; insertion attenuation; loaded Q-values; natural single phase unidirectional transducer; reflection gratings; resonance frequency; two port resonators; Attenuation; Fingers; Frequency measurement; Frequency response; Gratings; Reflection; Resonance; Resonant frequency; Surface acoustic waves; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-7582-3

Type

conf

DOI

10.1109/ULTSYM.2002.1193451

Filename

1193451