DocumentCode
405702
Title
Fabrication of LiNbO3 thin film by pulsed laser deposition and estimation of nonlinear property
Author
Gunji, Soichiro ; Shimizu, Youhei ; Nakata, Yoshiki ; Okada, Tatsuo ; Mae, Mitsuo
Author_Institution
Graduate Sch. of ISEE, Kyushu Univ., Fukuoka, Japan
Volume
2
fYear
2003
fDate
15-19 Dec. 2003
Abstract
LiNbO3 thin films were deposited by pulsed-laser deposition (PLD) method. Crystalline and transparent films were deposited on sapphire substrate at 400 °C and in 100 mTorr of oxygen gas pressure. The nonlinear property was measured by SHG experiment.
Keywords
ferroelectric thin films; lithium compounds; optical films; optical harmonic generation; pulsed laser deposition; 100 mtorr; 400 degC; Al2O3; LiNbO3 thin film; LiNbO3; PLD; SHG experiment; nonlinear property; oxygen gas pressure; pulsed laser deposition; Crystallization; Educational institutions; Gas lasers; Optical device fabrication; Optical pulses; Optical waveguides; Pulsed laser deposition; Sputtering; Substrates; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN
0-7803-7766-4
Type
conf
DOI
10.1109/CLEOPR.2003.1277212
Filename
1277212
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