Fast extraction of 3-D interconnect resistance: numerical-analytical coupling method

Fast and accurate parasitic parameter extraction becomes more and more important for VLSI design. In this paper, a fast and accurate method is presented to extract three-dimensional interconnect resistance. In this method, the whole resistance region is firstly cut into regular parts and irregular parts. The resistance extraction of these two kinds of parts is solved using the analytical formula and the numerical method of 3-D boundary element method respectively. Experiments on real layout cases show that, compared with the commercial software Raphael and the method of 3-D BEM without analytical method coupled, the proposed analytical-numerical coupling method has a speedup of more than 2000 and 40 respectively while preserving high accuracy.