• DocumentCode
    412056
  • Title

    Vertical integration of silica and electro-optic polymer waveguides using grayscale lithography

  • Author

    Chang, Daniel H. ; Azfar, Talal ; Fetterman, H.R. ; Zhang, Cheng ; Steier, William H.

  • Author_Institution
    UCLA Dept. of Electrical Engineering
  • fYear
    2003
  • fDate
    6-6 June 2003
  • Firstpage
    1063
  • Lastpage
    1065
  • Keywords
    Gray-scale; High speed optical techniques; Integrated optics; Lithography; Optical waveguides; Planar waveguides; Polymers; Probes; Resists; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2003. CLEO '03. Conference on
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    1-55752-748-2
  • Type

    conf

  • Filename
    1298205
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=412056