DocumentCode
415416
Title
Integration of micro-optics and micromechanics
Author
Herzig, H.P.
Author_Institution
Inst. of Microtechnol., Neuchatel Univ., Switzerland
fYear
2003
fDate
22-27 June 2003
Firstpage
672
Abstract
Micro-optics includes a family of optical components and systems that are fabricated with the aid of modern micromachining. The major strength of micro-optics compared to conventional optics lies in the fact that micro-optics allows the fabrication of large arrays of various optical elements for complex beam-shaping tasks and the integration of large optical system. The emergence of replication techniques such as injection molding allows low cost mass-production.
Keywords
injection moulding; integrated optics; mass production; micro-optics; optical design techniques; optical elements; optical fabrication; replica techniques; complex beam-shaping task; injection molding; large array fabrication; mass-production; micro-optics integration; micromechanics integration; optical component; optical element; optical system; replication technique; Integrated optics; Micromechanical devices; Optical arrays; Optical device fabrication; Optical diffraction; Optical filters; Optical interconnections; Optical refraction; Optical surface waves; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN
0-7803-7734-6
Type
conf
DOI
10.1109/CLEOE.2003.1313729
Filename
1313729
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