Fully embedded LTCC spiral inductors incorporating air cavity for high Q-factor and SRF

Author

Eun, K.C. ; Lee, Y.C. ; Lee, J.W. ; Song, M.-S. ; Park, C.S.

Author_Institution

Adv. Radio Frequency Res. Group, ETRI, Taejeon, South Korea

Volume

1

fYear

2004

fDate

1-4 June 2004

Firstpage

1101

Abstract

In this paper, a new fully-embedded LTCC spiral inductor is proposed by incorporating an air cavity between the spiral and ground plane for high quality factor (Q-factor) and high self-resonant frequency (SRF). The disadvantage of fully embedded structure without an air cavity is the reduction of size efficiency in the RF system, since its structure needs a lot of layers to decrease parasitic capacitance between the spiral and ground plane for high Q-factor and SRF. The air cavity employed under the spiral reduces the shunt parasitic capacitance of the inductor, and results in high Q-factor and high SRF of the embedded inductors. The measured results of the optimized spiral inductor with the embedded air cavity show a maximum Q of 51 and SRF of 9.1 GHz, while those of the conventional spiral inductor describe a maximum Q of 43 and SRF of 8 GHz with effective inductance of 2.7 nH.

Keywords

Q-factor; capacitance; ceramic packaging; inductors; radiofrequency integrated circuits; air cavity; fully embedded LTCC spiral inductors; high quality factor; high self-resonant frequency; low loss LTCC dielectric; optimized spiral inductor; parasitic capacitance; size efficiency; Dielectric losses; Inductors; Integrated circuit packaging; Low-noise amplifiers; MMICs; Parasitic capacitance; Q factor; Radio frequency; Silver; Spirals;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Components and Technology Conference, 2004. Proceedings. 54th

Print_ISBN

0-7803-8365-6

Type

conf

DOI

10.1109/ECTC.2004.1319477

Filename

1319477