DocumentCode
432557
Title
Microwave characterization of ferroelectric ceramic films
Author
Deleniv, A. ; Gevorgian, S. ; Jantunnen, H. ; Hu, T.
Volume
2
fYear
2004
fDate
12-14 Oct. 2004
Firstpage
541
Lastpage
544
Abstract
A reflection type resonance method for microwave characterization of high permittivity ceramic films on dielectric substrates is proposed and demonstrated experimentally. The effect of the air gap on the measurement accuracy for an E-plane loaded sample is analyzed using HFSS. The method is used for microwave characterization of LTCC ferroelectric ceramic films on alumina substrate at X-hand frequencies. The measurement error of the dielectric permittivity is less than 5%.
Keywords
Ceramics; Dielectric constant; Dielectric measurements; Dielectric substrates; Ferroelectric films; Ferroelectric materials; Frequency measurement; Loaded waveguides; Permittivity measurement; Resonance;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2004. 34th European
Conference_Location
Amsterdam, The Netherlands
Print_ISBN
1-58053-992-0
Type
conf
Filename
1418872
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