DocumentCode
432600
Title
Multi-finger RF MEMS variable capacitors for RF applications
Author
Kannan, H. ; Lakshminarayanan, B. ; Weller, T.
Volume
2
fYear
2004
fDate
12-14 Oct. 2004
Firstpage
717
Lastpage
720
Abstract
This paper presents a digital type RF MEMS variable capacitor with a tuning range on the order of 10:l. The digital tuning is obtained by having multiple beams suspended on a single pedestal. The typical actuation voltage is approximately 3 M O V but can be reduced to the 10-35V range with certain design modifications. The unloaded Q of the capacitor at 1 GHz in the up state is greater than 150, and as the Q can approach 90 in the down state.
Keywords
Capacitance; Coplanar waveguides; MIM capacitors; Micromechanical devices; Q factor; Q measurement; Radio frequency; Radiofrequency microelectromechanical systems; Tuning; Varactors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2004. 34th European
Conference_Location
Amsterdam, The Netherlands
Print_ISBN
1-58053-992-0
Type
conf
Filename
1418918
Link To Document