• DocumentCode
    437238
  • Title

    3D microstructures fabrication of paraffin or plastics with laser heating

  • Author

    Tsukada, N. ; Nakao, Tomoki ; Higuchi, T.

  • Author_Institution
    Tokyo Univ., Japan
  • fYear
    2005
  • fDate
    30 Jan.-3 Feb. 2005
  • Firstpage
    576
  • Lastpage
    579
  • Abstract
    This paper reports a novel fabrication technology for three dimensional (3D) microstructures of thermoplastic materials with laser heating. This technology employs the phenomenon that a thermoplastic material melted by laser heating grows into a convex shape with a high aspect ratio in a liquid. It does not require a mask or mold, therefore, the microstructure can be manufactured in a short time with a low cost. The size of the microstructures can be controlled by parameters of laser irradiation, including power and time. With this technique, we have fabricated various microstructures such as pillars, oblique pillars, and lines from paraffin. Also, a microstructure of polyethylene, one of general-purpose plastic materials, has been fabricated.
  • Keywords
    heating; laser beam machining; laser materials processing; plastics; 3D microstructure fabrication; high aspect ratio; laser heating; laser irradiation; oblique pillars; paraffin; polyethylene; thermoplastic materials; Costs; Heating; Manufacturing; Microstructure; Optical control; Optical device fabrication; Optical materials; Plastics; Shape; Size control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-8732-5
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2005.1453995
  • Filename
    1453995