DocumentCode
437238
Title
3D microstructures fabrication of paraffin or plastics with laser heating
Author
Tsukada, N. ; Nakao, Tomoki ; Higuchi, T.
Author_Institution
Tokyo Univ., Japan
fYear
2005
fDate
30 Jan.-3 Feb. 2005
Firstpage
576
Lastpage
579
Abstract
This paper reports a novel fabrication technology for three dimensional (3D) microstructures of thermoplastic materials with laser heating. This technology employs the phenomenon that a thermoplastic material melted by laser heating grows into a convex shape with a high aspect ratio in a liquid. It does not require a mask or mold, therefore, the microstructure can be manufactured in a short time with a low cost. The size of the microstructures can be controlled by parameters of laser irradiation, including power and time. With this technique, we have fabricated various microstructures such as pillars, oblique pillars, and lines from paraffin. Also, a microstructure of polyethylene, one of general-purpose plastic materials, has been fabricated.
Keywords
heating; laser beam machining; laser materials processing; plastics; 3D microstructure fabrication; high aspect ratio; laser heating; laser irradiation; oblique pillars; paraffin; polyethylene; thermoplastic materials; Costs; Heating; Manufacturing; Microstructure; Optical control; Optical device fabrication; Optical materials; Plastics; Shape; Size control;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-8732-5
Type
conf
DOI
10.1109/MEMSYS.2005.1453995
Filename
1453995
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