• DocumentCode
    439962
  • Title

    Silicon gate complementary MOS structure with field shield

  • Author

    Lin, H.C. ; Hayes, Patrick J

  • Volume
    17
  • fYear
    1971
  • fDate
    1971
  • Firstpage
    26
  • Lastpage
    26
  • Abstract
    Conventional aluminum gate complementary MOS transistor structures normally have the p-channel transistor fabricated in a low concentration ( \\sim10^{15} impurity atoms/cm3) (1,0,0) oriented silicon substrate and the n-channel transistor fabricated in an isolated p-type "well" with a surface concentration on the order of 1016impurity atoms/cm3diffused into the n-type substrate. If silicon gate technology is to be implemented for CMOS structures of similar background concentrations with a p-doped gate used for the p-channel transistors and an n-doped gate used for the n-channel transistors, the p-channel devices tend to be in depletion mode which is undesirable for switching circuits.
  • Keywords
    Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1971 International
  • Conference_Location
    IEEE
  • Type

    conf

  • Filename
    1476694