• DocumentCode
    439993
  • Title

    "Ion implantation of N+buried layers for silicon integrated circuits"

  • Author

    Drum, C.M. ; Miller, Paul

  • Volume
    17
  • fYear
    1971
  • fDate
    1971
  • Firstpage
    12
  • Lastpage
    12
  • Keywords
    Doping; Implants; Ion implantation; Laboratories; Laser beams; Silicon; Surface emitting lasers; Surface topography; Telephony; Temperature control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1971 International
  • Conference_Location
    IEEE
  • Type

    conf

  • Filename
    1476826
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=439993