DocumentCode
440210
Title
75 GHz Bipolar Production Technology for the 21st Century
Author
Klein, Wolfgang ; Klepser, Bemd-Ulrich H.
Author_Institution
Infineon Technologies, Munich, Germany
Volume
1
fYear
1999
fDate
13-15 Sept. 1999
Firstpage
88
Lastpage
94
Keywords
CMOS process; CMOS technology; Cutoff frequency; Epitaxial growth; Germanium silicon alloys; Integrated circuit technology; Noise figure; Parasitic capacitance; Production; Silicon germanium;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location
Leuven, Belgium
Print_ISBN
2-86332-245-1
Type
conf
Filename
1505453
Link To Document