The decananometer CMOS era - Is there CMOS after CMOS?

Author

Deleonibus, S. ; Caillat, C. ; Gautier, J. ; Guegan, G. ; Heitzmann, M. ; Martin, F. ; Tedesco, Salvatore

Author_Institution

LETI, Grenoble, France

Volume

fYear

1999

fDate

13-15 Sept. 1999

Firstpage

119

Lastpage

126

Keywords

CMOS technology; Dielectric substrates; Doping; Fluctuations; Lithography; Low voltage; Power dissipation; Production; Threshold voltage; Tunneling;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1999. Proceeding of the 29th European

Conference_Location

Leuven, Belgium

Print_ISBN

2-86332-245-1

Type

Filename

1505457

Link To Document