DocumentCode
440273
Title
The Effect of Oxide Patterned Layers on the Rapid Thermal Oxidation of Polycrystalline Silicon
Author
Sullivan, B. J O ; Hurley, P.K. ; Mathewson, A. ; Beanland, R. ; Rodrigues, R. ; Kay, P.
Author_Institution
National Microelectronics Research Centre, Cork, Ireland
Volume
1
fYear
1999
fDate
13-15 Sept. 1999
Firstpage
424
Lastpage
427
Keywords
Annealing; Capacitors; Contacts; Dielectrics; Materials science and technology; Microelectronics; Oxidation; Semiconductor films; Silicon compounds; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location
Leuven, Belgium
Print_ISBN
2-86332-245-1
Type
conf
Filename
1505530
Link To Document