DocumentCode
443283
Title
Design and simulation of RF MEMS switches for high switching speed and moderate voltage operation
Author
Saha, Shimul Chandra ; Singh, Tajeshwar ; Saether, Trond
Author_Institution
Dept. of Electron. & Telecommun., Norwegian Univ. of Sci. & Technol., Trondheim, Norway
Volume
1
fYear
2005
fDate
25-28 July 2005
Firstpage
233
Abstract
In this paper we present the design and simulations of an RF MEMS switch with regard to its switching speed and pull-down voltage. The switch is required to fulfill the requirements of high speed and a moderate pull down voltage for the switching of CMUT (capacitive micromachined ultrasonic transducer) elements used for ultrasound imaging.
Keywords
capacitive sensors; high-speed techniques; microswitches; ultrasonic transducers; RF MEMS switches; capacitive micromachined ultrasonic transducer elements; high switching speed; moderate voltage operation; pull down voltage; Biomembranes; Electrodes; Probes; Radiofrequency microelectromechanical systems; Signal processing; Switches; Telecommunication switching; Ultrasonic imaging; Ultrasonic transducers; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Research in Microelectronics and Electronics, 2005 PhD
Print_ISBN
0-7803-9345-7
Type
conf
DOI
10.1109/RME.2005.1543046
Filename
1543046
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