DocumentCode
452221
Title
3D Hollow Waveguides for Micromachined Tunable Photonic Devices
Author
Miura, Toru ; Koyama, Fumio
Author_Institution
Tokyo Inst. of Technol., Yokohama
Volume
2
fYear
2002
fDate
8-12 Sept. 2002
Firstpage
1
Lastpage
2
Abstract
We demonstrate a three dimensional (3D) hollow waveguide with a lateral confinement caused by a step in an etched groove. Low propagation loss is predicted with a help of multilayer coating. We propose novel micromachined tunable waveguide devices based on the hollow optical waveguide
Keywords
micromachining; micromechanical devices; optical fabrication; optical losses; optical multilayers; optical tuning; optical waveguides; etching; hollow waveguides; micromachining; multilayer coating; propagation loss; tunable photonic devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Communication, 2002. ECOC 2002. 28th European Conference on
Conference_Location
Copenhagen
Print_ISBN
87-90974-63-8
Type
conf
Filename
1601011
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