• DocumentCode
    452385
  • Title

    Optical Loss Analysis of Silicon Rich Nitride Waveguides

  • Author

    Mertens, H. ; Andersen, K.N. ; Svendsen, W.E.

  • Author_Institution
    COM, Technical University of Denmark, Building 345 west, DK-2800 Kgs. Lyngby, Denmark, hm@com.dtu.dk
  • Volume
    3
  • fYear
    2002
  • fDate
    8-12 Sept. 2002
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    An analysis of the propagation loss in high-index LPCVD-grown silicon rich nitride (SRN) slab waveguides and channel waveguides is presented. A propagation loss as low as 0.6 dB/cm has been achieved.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Communication, 2002. ECOC 2002. 28th European Conference on
  • Conference_Location
    Copenhagen
  • Print_ISBN
    87-90974-63-8
  • Type

    conf

  • Filename
    1601190
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=452385