DocumentCode
452662
Title
Shear mode coupling and tilted grain growth of A1N thin films in BAW resonators
Author
Martin, F. ; Jan, M.-E. ; Rey-Mermet, S. ; Su, D. ; Muralt, P. ; Cantoni, M.
Volume
1
fYear
2005
fDate
18-21 Sept. 2005
Firstpage
333
Lastpage
336
Keywords
Dielectric substrates; Electrodes; Magnetic analysis; Magnetic flux; Permittivity; Piezoelectric films; Radio frequency; Scanning electron microscopy; Sputtering; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2005 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-9382-1
Type
conf
DOI
10.1109/ULTSYM.2005.1602862
Filename
1602862
Link To Document