Integration of IC technology with MEMS: Silicon+ technology for the future

Author

Walton, A.J. ; Stevenson, J.T.M. ; Underwood, I. ; Terry, J.G. ; Smith, S. ; Parkes, W. ; Dunare, C. ; Lin, H. ; Li, Y. ; Henderson, R. ; Renshaw, D. ; Muir, K. ; Desmulliez, M. ; Flynn, D. ; MacIntosh, M.J. ; Holland, W.S. ; Murray, A.F. ; Tang, T.B. ; B

Author_Institution

Institute of Integrated Systems, University of Edinburgh (IMNS), UK Astronomy Technology Centre and Heriot Watt, Edinburgh

fYear

2007

fDate

25-25 April 2007

Firstpage

Lastpage

fLanguage

English

Publisher

iet

Conference_Titel

Micro Electro-Mechanical Systems, 2007. MEMS Technology. 2007 IET Seminar on

Conference_Location

London, UK

ISSN

0537-9989

Print_ISBN

978-0-86341-807-5

Type

Filename

4266802

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