• DocumentCode
    468871
  • Title

    Displays, Sensors, and MEMS - RF MEMS

  • Author

    Weber, Werner ; Friedman, Thomas A.

  • Author_Institution
    Infineon Technologies AG
  • fYear
    2007
  • fDate
    10-12 Dec. 2007
  • Firstpage
    409
  • Lastpage
    409
  • Keywords
    CMOS technology; Circuits; Displays; Laboratories; Micromechanical devices; Oscillators; Radio frequency; Radiofrequency microelectromechanical systems; Silicon; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2007. IEDM 2007. IEEE International
  • Conference_Location
    Washington, DC
  • Print_ISBN
    978-1-4244-1507-6
  • Electronic_ISBN
    978-1-4244-1508-3
  • Type

    conf

  • DOI
    10.1109/IEDM.2007.4418959
  • Filename
    4418959
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=468871