Design, Manufacture and Performance of Monolithic PIN Diodes for Beam Steered Reflectarray

Author

Rainey, P.V. ; Bain, M. ; Jackson, Robert ; Mitchell, S.N. ; Linton, D. ; Fusco, Vincent F. ; Gamble, Harold S.

Author_Institution

Sch. of Electron., Queen´s Univ. of Belfast, Belfast

fYear

2007

fDate

11-16 Nov. 2007

Firstpage

1

Lastpage

5

Abstract

A novel technology is described for fabricating monolithic PIN diodes for use as switching devices in a circularly polarised reflectarray antenna. The process is based on silicon-on-silicide-on-insulator (SSOI) substrates. These have the advantage of a buried silicide contact layer of high conductivity, which also provides a dopant diffusion conduit, and a buried oxide providing low parasitic capacitance. In this initial prototype, the diode series resistance is consistently 10 Omega. The technique is believed to be a reliable, low complexity and cost effective method of producing a multi dipole reflectarray.

Keywords

dipole antenna arrays; p-i-n diodes; reflector antennas; beam steered reflectarray; buried silicide contact layer; circularly polarised reflectarray antenna; dopant diffusion conduit; monolithic PIN diodes; multi dipole reflectarray; resistance 10 ohm; silicon-on-silicide-on-insulator substrates; switching devices; PIN diode; Reflectarray; monolithic integration;

fLanguage

English

Publisher

iet

Conference_Titel

Antennas and Propagation, 2007. EuCAP 2007. The Second European Conference on

Conference_Location

Edinburgh

Print_ISBN

978-0-86341-842-6

Type

conf

Filename

4458740