DocumentCode
472633
Title
A Three Dimensional Static RAM
Author
Nishimura, T. ; Inoue, Y. ; Sugahara, K. ; Nakaya, M. ; Horiba, Y. ; Akasaka, Y.
Author_Institution
LSI Research and Development Labolatory Mitsubishi Electric Corporation 4-1 Mizuhara, Itami 664, Japan
fYear
1985
fDate
14-16 May 1985
Firstpage
30
Lastpage
31
Keywords
CMOS technology; Circuits; Fabrication; Large scale integration; MOSFETs; Power dissipation; Power supplies; Random access memory; Read-write memory; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1985. Digest of Technical Papers. Symposium on
Conference_Location
Kobe, Japan
Print_ISBN
4-930813-09-3
Type
conf
Filename
4480288
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