• DocumentCode
    472633
  • Title

    A Three Dimensional Static RAM

  • Author

    Nishimura, T. ; Inoue, Y. ; Sugahara, K. ; Nakaya, M. ; Horiba, Y. ; Akasaka, Y.

  • Author_Institution
    LSI Research and Development Labolatory Mitsubishi Electric Corporation 4-1 Mizuhara, Itami 664, Japan
  • fYear
    1985
  • fDate
    14-16 May 1985
  • Firstpage
    30
  • Lastpage
    31
  • Keywords
    CMOS technology; Circuits; Fabrication; Large scale integration; MOSFETs; Power dissipation; Power supplies; Random access memory; Read-write memory; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1985. Digest of Technical Papers. Symposium on
  • Conference_Location
    Kobe, Japan
  • Print_ISBN
    4-930813-09-3
  • Type

    conf

  • Filename
    4480288