DocumentCode

472723

Title

The Mechanism of the DESIRE Process

Author

Roland, B. ; Lombaerts, R. ; Coopmans, F.

Author_Institution

UCB Electronics N. V., Anderlechtstraat 33, B-1620 Drogenbos Belgium

fYear

1987

fDate

22-23 May 1987

Firstpage

7

Lastpage

8

Keywords

Aluminum; Coatings; Etching; Optical reflection; Optical refraction; Plasma applications; Resins; Resists; Silicon; Surfaces;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1987. Digest of Technical Papers. Symposium on

Conference_Location

Karuizawa, Japan

Type

conf

Filename

4480395