• DocumentCode
    472725
  • Title

    Double Diffraction Alignment Method Using Checker Grating

  • Author

    Tabata, M. ; Tojo, T.

  • Author_Institution
    VLSI Research Center, Toshiba Corporation 1, Komukai-Toshiba-cho, Saiwai-ku, Kawasaki, 210, Japan
  • fYear
    1987
  • fDate
    22-23 May 1987
  • Firstpage
    11
  • Lastpage
    12
  • Keywords
    Diffraction gratings; Interferometric lithography; Lenses; Optical detectors; Optical diffraction; Optical interferometry; Optical sensors; Resists; Signal detection; Signal processing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1987. Digest of Technical Papers. Symposium on
  • Conference_Location
    Karuizawa, Japan
  • Type

    conf

  • Filename
    4480397
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=472725