DocumentCode
472773
Title
Optical Projection Lithography Status in 1981 and Trends for the Decade
Author
Wilczynski, Janusz S.
Author_Institution
IBM Thomas J. Watson Research Center P.O. Box 218, Yorktown Heights, NY 10598
fYear
1981
fDate
9-11 Sept. 1981
Firstpage
2
Lastpage
3
Keywords
Lenses; Lithography; Nonlinear optics; Optical design; Optical devices; Optical distortion; Optical interferometry; Optical refraction; Optical sensors; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1981. Digest of Technical Papers. Symposium on
Conference_Location
Maui, HI, USA
Type
conf
Filename
4480496
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