DocumentCode
474328
Title
Low Design of Micromachined Coplanar Grounded Wave-Guides
Author
De Angelis, G. ; Lucibello, A. ; Proietti, E. ; Catoni, S. ; Marcelli, R.
Author_Institution
CNR-IMM Roma, Rome
Volume
1
fYear
2007
fDate
Oct. 15 2007-Sept. 17 2007
Firstpage
271
Lastpage
274
Abstract
Coplanar wave-guide grounded lines (CPWG) have been designed for being realized by micromachining of high resistivity silicon wafers. Actually, different configurations have been compared between them by changing the dimensions of micromachined via-holes, as well as their number and separation, to get the optimal electrical matching conditions for CPWG lines. Wide-band matching and low losses have been predicted up to 30 GHz, and preliminary experimental results about the technology have been obtained.
Keywords
coplanar waveguides; coplanar wave-guide grounded lines; frequency 30 GHz; micromachined coplanar grounded wave-guides; micromachined via-holes; optimal electrical matching; silicon wafers; wide-band matching; Conductivity; Coplanar waveguides; Etching; Joining processes; Micromachining; Microstrip; Packaging; Silicon; Thermal resistance; Wideband; RF MEMS; micromachining;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4244-0847-4
Type
conf
DOI
10.1109/SMICND.2007.4519699
Filename
4519699
Link To Document