DocumentCode
481297
Title
Modeling and experimental analyses for Nano-Positioning Compliant Mechanisms
Author
Qin, Yu ; Feng, Zhijing
Author_Institution
Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, 10008 China
fYear
2006
fDate
6-7 Nov. 2006
Firstpage
1228
Lastpage
1231
Abstract
There are non-linear errors, hysteresis errors and so on in the actuators made of piezoelectric ceramics. And these errors are especially conspicuous in the case of large range motion. In this paper, we gain nano-positioning accuracy of the conventional mechanical device by compliant mechanism for motion reduction.
Keywords
Nano-positioning; compliant mechanisms; finite element method;
fLanguage
English
Publisher
iet
Conference_Titel
Technology and Innovation Conference, 2006. ITIC 2006. International
Conference_Location
Hangzhou
ISSN
0537-9989
Print_ISBN
0-86341-696-9
Type
conf
Filename
4752189
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