C2. TCAD for ESD

The use of TCAD for ESD protection device development and optimization is state-of-the-art today. Most companies have a calibrated TCAD environment and TCAD is heavily used in process and device development. ESD teams are taking advantage of the calibrated TCAD environment to speed up ESD protection device development and gain indispensable insight not possible by measurements. However, specific know-how is required to successfully leverage TCAD for ESD. In this workshop we want to discuss advantages and limits of using TCAD for ESD protection device development. A special focus should be on the topic of ESD-specific calibration of the physical models and the model capabilities for ESD. Another point of discussion will be TCAD methodologies for ESD and how they can be integrated into the development process. Attendees are encouraged to share their experiences, possible pitfalls, and shortcomings of TCAD for ESD.