DocumentCode
492938
Title
Microelectromechanical system design based on Si nanowires
Author
Klimovskaya, Alla ; Ostrovskii, Ihor ; Khoverko, Yurii ; Nichkalo, Stepan
fYear
2009
fDate
24-28 Feb. 2009
Firstpage
504
Lastpage
505
Abstract
In this paper growth of Si nanowires by CVD method was studied. Electromechanical systems based on Si nanowires were designed.
Keywords
elemental semiconductors; micromechanical devices; nanowires; silicon; CVD method; microelectromechanical system design; nanowires; Gold; Heating; Hydrogen; Microelectromechanical systems; Nanowires; Semiconductor films; Substrates; Temperature distribution; Temperature sensors; Wires; CVD method; Electomechanical system; nanowires;
fLanguage
English
Publisher
ieee
Conference_Titel
CAD Systems in Microelectronics, 2009. CADSM 2009. 10th International Conference - The Experience of Designing and Application of
Conference_Location
Lviv-Polyana
Print_ISBN
978-966-2191-05-9
Type
conf
Filename
4839896
Link To Document