DocumentCode
503228
Title
Control system of the laser topographer
Author
Kostka, Frantisek ; Zdansky, Karel ; Zavadil, Jiri ; Stary, Robert
Author_Institution
Inst. of Photonics & Electron. AS CR, Prague, Czech Republic
fYear
2009
fDate
9-10 Sept. 2009
Firstpage
157
Lastpage
160
Abstract
Universal apparatus for measuring photoluminescence (PL) over surface of semiconductor samples was designed and realized. It enables to obtain photoluminescence intensity distribution PL(x,y) across the investigated sample for preselected wavelength lambda as well as the spectral distribution PL(lambda) for a fixed position (x,y) on the sample surface. The PC controlled equipment consists of a composite optical setup, micromanipulators, and electric circuits serving to extract relevant signal from the noisy background.
Keywords
measurement by laser beam; optical control; photoluminescence; laser topographer control system; photoluminescence intensity distribution; photoluminescence measurement; spectral distribution; Circuits; Control systems; Micromanipulators; Optical control; Optical surface waves; Photoluminescence; Semiconductor lasers; Surface topography; Surface waves; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Applied Electronics, 2009. AE 2009
Conference_Location
Pilsen
ISSN
1803-7232
Print_ISBN
978-80-7043-781-0
Type
conf
Filename
5289255
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