DocumentCode
505929
Title
Finite element analysis of MEMS based Fabry-Perot optical filter with electrostatic actuation
Author
Wei, Lei ; Chen, Xuyuan
Author_Institution
Dept. of Photonics Eng., Tech. Univ. of Denmark, Lyngby, Denmark
fYear
2008
fDate
Oct. 30 2008-Nov. 2 2008
Firstpage
1
Lastpage
3
Abstract
Mechanical properties and tuning ability of MEMS based Fabry-Perot optical filter with electrostatic actuation are investigated. The simulation results demonstrate that the fringing field influence should be taken into account in structure design and modeling.
Keywords
electrostatic actuators; finite element analysis; micro-optomechanical devices; optical filters; optical tuning; Fabry-Perot optical filter; MEMS; electrostatic actuation; finite element analysis; fringing field; mechanical properties; tuning; Biomembranes; Electrostatic actuators; Electrostatic analysis; Fabry-Perot; Finite element methods; Mechanical factors; Micromechanical devices; Optical filters; Optical tuning; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication & Optoelectronic Exposition & Conference, 2008. AOE 2008. Asia
Conference_Location
Shanghai
Print_ISBN
978-1-55752-863-6
Electronic_ISBN
978-1-55752-863-6
Type
conf
Filename
5348757
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