Design and Simulation of Electrostatic Actuated Microrelay

The purpose of this paper is to present the analysis of electrostatic actuated microrelay with four terminals, single-pole, single-throw, and normally-open device with bridge contact (SPST-NO-Bridge) via simple analytical modeling and Finite Element Method (FEM). The behavior of the device has been simulated using electrostatic, mechanical and dynamic analysis. The results obtained by FEM and analytical analysis are in good agreement. Through optimization process of the physical structure, the total size of the device (without bondpads) is about 220 x 220 ¿m2, which is suitable for high integration circuitry. The results shows that minimum switching voltage is 17V with operating voltage of 24V and the device can go up to 2 KHz of switching frequency.