DocumentCode
513833
Title
Halo Doping for Good Performance and Reliability in 0.25 μm CMOS Technology
Author
Hendriks, Marton ; Badenes, Goncal ; Deferm, Ludo
Author_Institution
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
fYear
1996
fDate
9-11 Sept. 1996
Firstpage
515
Lastpage
518
Abstract
In this paper a structure with a large overlap in conjunction with halos is presented for the n-MOSFET which gives a compromise between good short channel behaviour and an excellent reliability.
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Conference_Location
Bologna, Italy
Print_ISBN
286332196X
Type
conf
Filename
5436176
Link To Document