High Performance Submicron SILO Process for High Density EPROM Memories Using Rapid Thermal Nitridation of Silicon

Author

Deleonibus, S. ; Molle, P. ; Lajzerowicz, J. ; Guillaumot, B. ; Laporte, P. ; Bergemont, A.

Author_Institution

LETI CENG Avenue des Martyrs, 38041 Grenoble CEDEX France

fYear

1989

fDate

11-14 Sept. 1989

Firstpage

151

Lastpage

154

Keywords

Cleaning; Diodes; Dry etching; EPROM; Lead compounds; Oxidation; Plasma applications; Rapid thermal processing; Silicon; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Device Research Conference, 1989. ESSDERC '89. 19th European

Conference_Location

Berlin, Germany

Print_ISBN

0387510001

Type

Filename

5436644

Link To Document