DocumentCode
516975
Title
A SEM Video Gating System for Dynamic Inspection of Integrated Circuits
Author
Ranasinghe, D. ; Proctor, G. ; Speight, J.D.
fYear
1978
fDate
18-21 Sept. 1978
Firstpage
169
Lastpage
170
Abstract
The application of an SEM video gating system to dynamic inspection of large scale integrated circuits is discussed. The use of the technique to isolate design faults in a prototype scrambler/descrambler circuit is described.
Keywords
dynamic testing; integrated circuit testing; integrated circuits; large scale integration; scanning electron microscopy; SEM video gating system; dynamic inspection; large scale integrated circuits; prototype scrambler-descrambler circuit; Blanking; Circuit faults; Clocks; Electron beams; Inspection; Large scale integration; Prototypes; Pulse measurements; Registers; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Circuits Conference - Digest of Technical Papers, 1978. ESSCIRC 78. 4th European
Conference_Location
Amsterdam
Type
conf
Filename
5469008
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