DocumentCode
520616
Title
Photonic devices in low-temperature laser-crystallized deposited silicon
Author
Preston, Kyle ; Poitras, Carl B. ; Thompson, Michael O. ; Lipson, Michal
Author_Institution
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
fYear
2010
fDate
16-21 May 2010
Firstpage
1
Lastpage
2
Abstract
We demonstrate integrated optical devices in deposited silicon crystallized at room temperature for 3D photonic integration. These devices can enable electro-optic switching and modulation on low-temperature substrates such as glass, plastic, and post-back-end CMOS wafers.
Keywords
Crystallization; Electrooptic devices; Electrooptic modulators; Glass; Lasers and electrooptics; Optical devices; Photonic crystals; Plastics; Silicon; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location
San Jose, CA, USA
Print_ISBN
978-1-55752-890-2
Electronic_ISBN
978-1-55752-890-2
Type
conf
Filename
5500203
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