DocumentCode
528358
Title
Monolithic integration of germanium photodetectors and silicon wire waveguide devices
Author
Tsuchizawa, Tai ; Park, Sungbong ; Watanabe, Toshifumi ; Shinojima, Hiroyuki ; Nishi, Hidetaka ; Yamada, Koji ; Ishikawa, Yasuhiko ; Wada, Kazumi ; Itabashi, Seiichi
Author_Institution
NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan
fYear
2010
fDate
5-9 July 2010
Firstpage
526
Lastpage
527
Abstract
We describe our recent progress in Si photonic integration technology focusing on the monolithic integration of a germanium photodetector and a silicon-wire-waveguide variable optical attenuator.
Keywords
elemental semiconductors; germanium; optical attenuators; optical waveguides; photodetectors; semiconductor devices; silicon; waveguide attenuators; Ge; Si; germanium photodetectors; monolithic integration; silicon photonic integration technology; silicon-wire-waveguide variable optical attenuator; Optical attenuators; Optical fibers; Photodetectors; Photonics; Silicon; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
OptoElectronics and Communications Conference (OECC), 2010 15th
Conference_Location
Sapporo
Print_ISBN
978-1-4244-6785-3
Type
conf
Filename
5588561
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