The design and characteristic study of a 3-dimensional piezoelectric nano-positioner

This paper presents a mechanical design method of “thin column group” guidance and multi-actuator parallel mechanism for three degrees of freedom translations, since multi-actuator parallel mechanism is utilized to implement planar motions which are general requirements for the nano-positioner. The traveling range of this nano-positioner is 5 μm in the X-, Y-directions and in the vertical direction. The three-dimensional nano-positioner has several advantages such as low-cost, high-precision, and can be applied to the assembly, processing, bio-tech and medicine detection and semi-conduct industry. In the feedback controller, we choose MATLAB/Simulink, Real-Time Workshop, a software widely used by the academic community, as tools to study rapid controller prototyping. The parameters are controlled based on proportion-integral control law that is easily used and has a good performance.