Yield monitoring system for silicon wafer

Wafer quality monitoring is getting more and more important for device makers because device/process margin against wafer quality variability get smaller and smaller as the technology shrinks. We developed a yield reporting system for wafer quality data monitoring. This system enables us to detect yield degradation caused by silicon wafer and also to improve yield by monitoring difference among wafer suppliers. Several use cases of detecting yield degradation and improving yield are described in this paper.