• DocumentCode
    542542
  • Title

    Surface stress effect on parameters of surface acoustic wave devices

  • Author

    Melnychuk, Andrii ; Matviykiv, Mykhailo

  • Author_Institution
    Lviv Polytech. Nat. Univ., Lviv, Ukraine
  • fYear
    2011
  • fDate
    23-25 Feb. 2011
  • Firstpage
    380
  • Lastpage
    381
  • Abstract
    In this paper surface stress effect on parameters of surface acoustic wave devices is suggested.
  • Keywords
    stress analysis; surface acoustic wave devices; mechanical stress; surface acoustic wave device; surface stress; Solids; Stress; Surface acoustic wave devices; Surface acoustic waves; surface acoustic wave; surface acoustic wave device parameter; surface stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    CAD Systems in Microelectronics (CADSM), 2011 11th International Conference The Experience of Designing and Application of
  • Conference_Location
    Polyana-Svalyava
  • Print_ISBN
    978-1-4577-0042-2
  • Electronic_ISBN
    978-966-2191-17-2
  • Type

    conf

  • Filename
    5744502
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=542542