Energy transfer by plasmon mode during macromolecules ion irradiation

Author

Jean-Pierre, Moliton ; Andre, Moliton ; Thierry, Trigaud ; Jean-Luc, Bredas ; Lhost, Olivier

Author_Institution

Lab. d´´Electron. des Polymeres sous Faisceaux Ioniques (LEPOFI), Limoges, France

Volume

1

fYear

1992

fDate

Oct. 29 1992-Nov. 1 1992

Firstpage

127

Lastpage

128

Abstract

Macromolecules can show two widely different behaviours during ion bombardement, in the 100 keV energy range, so long as the ion fluence remains below a classical value of 10¹⁷ ions/cm². The ones are subject to a such important volume contraction that they can completely disappear. That is the case of cellulose nitrate used in microelectronics as self-developing resist for ion lithography. The second category shows no significant shrinkage ; only a small surface sputtering is observed. We find in this case the electroactive polymers.

Keywords

biological effects of ionising particles; biomolecular effects of radiation; ion beam effects; macromolecules; molecular biophysics; plasmons; polymers; cellulose nitrate; electroactive polymers; electron volt energy 100 keV; energy transfer; ion bombardement; ion lithography; macromolecule ion irradiation; microelectronics; plasmon mode; self-developing resist; surface sputtering; Biological system modeling; Lead; Plastics;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society, 1992 14th Annual International Conference of the IEEE

Conference_Location

Paris

Print_ISBN

0-7803-0785-2

Electronic_ISBN

0-7803-0816-6

Type

conf

DOI

10.1109/IEMBS.1992.5760889

Filename

5760889