A fully-integrated cantilever-based DNA detection SoC in a CMOS Bio-MEMS process

Author

Huang, Yu-Jie ; Huang, Che-Wei ; Lin, Tsung-Hsien ; Lin, Chih-Ting ; Chen, Li-Guang ; Hsiao, Po-Yun ; Wu, Bi-Ru ; Hsueh, Hsiao-Ting ; Kuo, Bing-Jye ; Tsai, Hann-Huei ; Liao, Hsin-Hao ; Juang, Ying-Zong ; Wang, Chorng-Kuang ; Lu, Shey-Shi

Author_Institution

Nat. Taiwan Univ., Taipei, Taiwan

fYear

2011

fDate

15-17 June 2011

Firstpage

50

Lastpage

51

Abstract

A highly-integrated DNA detection SoC, which includes DNA sensors, readout circuit, MCU, and OOK TX/RX, is implemented in a 0.35μm CMOS Bio-MEMS process. For low DNA concentration, an oscillator-based self-calibrated readout circuit with high sensitivity (2kHz/Ω) is proposed to convert small resistance variation of the piezoresistive cantilever sensor into adequate frequency shift. The measured results reveal that it could detect <;0.02% of resistance variation (0.6Ω) and cover detection concentration range of specific DNA from 100pM to 1μM.

Keywords

CMOS integrated circuits; DNA; bioMEMS; biological techniques; cantilevers; electric sensing devices; molecular biophysics; piezoresistive devices; system-on-chip; CMOS BioMEMS process; DNA sensors; SoC; fully-integrated cantilever-based DNA detection; oscillator-based self-calibrated readout circuit; piezoresistive cantilever sensor; readout circuit; size 0.35 mum; Biosensors; CMOS integrated circuits; DNA; Frequency conversion; Sensitivity; System-on-a-chip;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Circuits (VLSIC), 2011 Symposium on

Conference_Location

Honolulu, HI

ISSN

2158-5601

Print_ISBN

978-1-61284-175-5

Type

conf

Filename

5986419