• DocumentCode
    554632
  • Title

    Error compensation algorithm and performance evaluation for phase-shifting interferometer

  • Author

    Mingxin Zhu ; Zhen Liu ; Yongxiang Xu

  • Author_Institution
    Coll. of Mech. Eng., Mongolia Univ. of Technol., Huhhot, China
  • Volume
    5
  • fYear
    2011
  • fDate
    12-14 Aug. 2011
  • Firstpage
    2745
  • Lastpage
    2748
  • Abstract
    Phase retrieval algorithms with a small number of grabbed buckets are very helpful to the phase-shifting interferometer (PSI) required real-time processing, so the algorithms within five buckets are very practical and are given more attention. In the paper, new 4 and 5-bucket algorithms are developed to compensate phase-shift deviation and detector nonlinearity. Numerical simulations and experiments performed on a Mach-Zehnder interferometer are carried out and verify that these two compensation algorithms hold a high degree of tolerance for two dominate error sources.
  • Keywords
    Mach-Zehnder interferometers; numerical analysis; phase shifting interferometry; 4-bucket algorithm; 5-bucket algorithm; Mach-Zehnder interferometer; detector nonlinearity; error compensation algorithms; error sources; grabbed buckets; numerical simulations; performance evaluation; phase retrieval algorithms; phase-shift deviation; phase-shifting interferometer; Detectors; Equations; Error compensation; Mathematical model; Optimized production technology; Phase measurement; Phase shifting interferometry; detector nonlinearity; error compensation algorithms; phase-shift deviation; phase-shifting interferometer;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic and Mechanical Engineering and Information Technology (EMEIT), 2011 International Conference on
  • Conference_Location
    Harbin, Heilongjiang, China
  • Print_ISBN
    978-1-61284-087-1
  • Type

    conf

  • DOI
    10.1109/EMEIT.2011.6023601
  • Filename
    6023601