DocumentCode
554909
Title
High precision adaptive control for XY-table driven by piezo-actuator
Author
Xinkai Chen
Author_Institution
Dept. of Electron. Inf. Syst., Shibaura Inst. of Technol., Saitama, Japan
fYear
2011
fDate
11-13 Aug. 2011
Firstpage
466
Lastpage
471
Abstract
The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
Keywords
adaptive control; piezoelectric actuators; position control; stability; Prandtl-Ishlinskii model; XY-table; global stability; high precision adaptive control; piezo electric actuators; positioning mechanism; Actuators; Adaptation models; Erbium; Force; Hysteresis; Mathematical model; Stability analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Mechatronic Systems (ICAMechS), 2011 International Conference on
Conference_Location
Zhengzhou
Print_ISBN
978-1-4577-1698-0
Type
conf
Filename
6024938
Link To Document