DocumentCode
556832
Title
Tool matching statistical methodology & application
Author
Huang, Sarah
Author_Institution
Stat. Dev. & Applic. Dept., Taiwan Semicond. Manuf. Co., Hsinchu, Taiwan
fYear
2011
fDate
5-6 Sept. 2011
Firstpage
1
Lastpage
8
Abstract
Presents a collection of slides covering the following topics: tool matching; statistical methods and semiconductor manufacturing.
Keywords
machine tools; semiconductor industry; statistical analysis; semiconductor manufacturing; statistical method; tool matching; Companies; Manufacturing processes; Production facilities; Qualifications; Statistical analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
Conference_Location
Hsinchu
ISSN
1523-553X
Print_ISBN
978-1-4577-1647-8
Type
conf
Filename
6086059
Link To Document