• DocumentCode
    556852
  • Title

    Iron (Fe) removal from cyclohexanone thinner used in lithography process using nylon 6,6 membrane filtration

  • Author

    Umeda, Toru ; Nakajima, Takao ; Yukawa, Hiroto ; Tsuzuki, Shuichi ; Sumiya, Masato ; Numaguchi, Toru

  • fYear
    2011
  • fDate
    5-6 Sept. 2011
  • Firstpage
    1
  • Lastpage
    10
  • Abstract
    Presents a collection of slides covering the following topics: iron removal process; lithography process; membrane filtration; cyclohexanone thinner; and metal reduction.
  • Keywords
    contamination; filtration; iron; lithography; pollution control; Fe; cyclohexanone thinner; iron removal process; lithography process; membrane filtration; metal reduction; Collaboration; Filtration; Fluids; Iron; Joints; Manufacturing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing (ISSM) and e-Manufacturing and Design Collaboration Symposium (eMDC), 2011 International Symposium on
  • Conference_Location
    Hsinchu
  • ISSN
    1523-553X
  • Print_ISBN
    978-1-4577-1647-8
  • Type

    conf

  • Filename
    6086079
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=556852