Comparative study of two types electro-thermally actuated micromirrors on silicon substrate

Author

Comanescu, F. ; Tibeica, C. ; Purica, M. ; Schiopu, P.

Author_Institution

Politeh.” Univ. of Bucharest, Bucharest, Romania

Volume

1

fYear

2011

fDate

17-19 Oct. 2011

Firstpage

91

Lastpage

94

Abstract

In this paper are presented the simulation results of two thermally actuated movable micromirrors on silicon-on-insulator. The response of the micromirrors, consisting in the displacement along z axe was investigated in static and dynamic regime using Coventor software taking into account the material parameters and geometry of the structure. Two different ways of actuation were investigated. The usage of diffused resistors as heaters for structure actuation was also investigated. Higher displacement was observed to the actuated structure and also the largest values of the Von Misses stress were concentrated in a few corners of the structure.

Keywords

integrated optics; micro-optomechanical devices; micromirrors; physics computing; resistors; silicon-on-insulator; thermoelectricity; Coventor software; Si; Von Misses stress; diffused resistors; electro-thermally actuated movable micromirrors; heaters; material parameters; silicon substrate; silicon-on-insulator; structure actuation; Adaptive optics; Micromirrors; Optical reflection; Optical sensors; Optical switches; Silicon; Stress; bimorph layer; electrothermal actuators; micromirror; thermal actuation;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference (CAS), 2011 International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-61284-173-1

Type

conf

DOI

10.1109/SMICND.2011.6095722

Filename

6095722